Microcantilever Based Integrated Temperature Sensor, Humidity Sensor and Moisture Sensor - Comparitive Analysis

Authors(3) :-B. Priyadarisshini, D. Sindhanaiselvi, T. Shanmuganatham

Microcantilever based integrtaed temperature sensor, humidity sensor and moisture sensor is proposed to reduce the cost of the device. This novel idea of integrating temperature, humidity and moisture sensor since they are inter dependent parameter in the environmental measurement. The proposed work investigates about the performance of the three sensor by placing them in a single silicon substrate. The structure which yields maximum deflection is the optimized method to fix the three sensors. The deflection analysis is carried out for temperature at 100ºC, relative humidity at 10% to 100% and the moisture range of 10 % to 100%.

Authors and Affiliations

B. Priyadarisshini
PG Scholar, Department of Electronics and Instrumentation Engineering, Pondicherry Engineering College, Puducherry, India
D. Sindhanaiselvi
Assistant Professor, Department of Electronics and Instrumentation Engineering, Pondicherry Engineering College, Puducherry, India
T. Shanmuganatham
Associate Professor, Department of Electronics Engineering, Pondicherry University, Puducherry, India

Temperture Cantilever, Humidity Cantilever, Moisture cantilever, Maximum Deflection.

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Publication Details

Published in : Volume 5 | Issue 3 | March-April 2018
Date of Publication : 2018-04-28
License:  This work is licensed under a Creative Commons Attribution 4.0 International License.
Page(s) : 218-223
Manuscript Number : IJSRSET185335
Publisher : Technoscience Academy

Print ISSN : 2395-1990, Online ISSN : 2394-4099

Cite This Article :

B. Priyadarisshini, D. Sindhanaiselvi, T. Shanmuganatham, " Microcantilever Based Integrated Temperature Sensor, Humidity Sensor and Moisture Sensor - Comparitive Analysis, International Journal of Scientific Research in Science, Engineering and Technology(IJSRSET), Print ISSN : 2395-1990, Online ISSN : 2394-4099, Volume 5, Issue 3, pp.218-223, March-April-2018. Citation Detection and Elimination     |     
Journal URL : https://ijsrset.com/IJSRSET185335

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