Investigation Study of Three In One Multiple Agricultural MEMS Sensor Using Microcantilever
Keywords:
Microcantilever, Temperature, Humidity, Soil Moisture, Deflection.Abstract
MEMS based three- in- one multiple sensor with soil Temperature, soil moisture and humidity sensor proposed using simple cantilever for the agricultural applications. These parameters are the most important parameters for agricultural monitoring to control the usage of water supply to the plants. The study is to find the optimized dimension of the three- in- one multiple MEMS sensor with respect to maximum deflection for the temperature range of 0°C to 40.556°C, relative humidity and the soil moisture range of 10 % to 100%. The dimension is optimized with respect to aspect ratio parameters such as length, width and thickness of different layers.
References
- Rong-Hua Ma, Chia-Yen Lee, Yu-Hsiang Wang, Hao-Jen Chen “Microcantilever-based weather station for temperature, humidity and flow rate measurement,” Microsyst Technol, vol. 14, pp. 971-977, November 2007.
- Jie Liu, Mangilal Agarwal, Kody Varahramyan,Ernest S. Berney IV, Wayne D. Hodo “Polymer- based microsensor for soil moisture measuremnet,” Sensors and Actuators, vol. B129, pp. 599-604, September 2007.
- Lung-Tai Chen, Chia – Yen Lee, and Wood-hi cheng, “MEMS-based humidity sensor with integrated temperature compensation mechanism,” Sensors and Actuators, vol. A147, pp. 522-528, July 2008.
- Ashish, Kumari Nidhi Gupta, Dr. T.Shanmuganantham, “Design Of Temperature Sensors For Enviromental Applications”, Int. Journal of Engineering Trends and Technology (IJETT) –Volume 4 Issue 10 - Oct 2013.
- B.Priyadarisshini, D.Sindhanaiselvi, T. shanmuganatham, “Design and dimension optimization of high sensitive microcantilever as humidity sensor,” IEEE,International Conference on Emergimg Devices and Smart Systems, Mahendra Engineering College, Namakkal, Tamil Nadu, 2,3 of March 2018.
- D.Sindhanaiselvi, T.Shanmuganantham, “Double Boss Sculptured Diaphragm Employed Piezoresistive Mems Pressure Sensor With Silicon-On-Insulator (SOI)” Journal of Engineering Science and Technology, School of Engineering, Taylor’s University., Vol. 12, July 2017
- Marie Joan Syndhya, D.Sindhanaiselvi, T.Shanmuganantham, “Design and Analysis of Rectangular type Pizoresistive Microcantilever for Antigen Detection”, International Journal of Control Theory and Application, International Science Press, Vol. 10, 2017.
- Marie Joan Syndhya, D.Sindhanaiselvi, T.Shanmuganantham, “ Investigation on Piezoresistive Micro Cantilever Design for Blood Glucose Sensing”, International Journal of Control Theory and Application, International Science Press , Vol. 10, 2017.
- D.Sindhanaiselvi, T.Shanmuganantham, “Investigation on Performance of Piezoelectric Beam Based Mems Actuator for Focussing of Micro Lens in Mobile Application”, IEEE International Conference on circuits and systems, 2017.
- Rajul S. Patkar, Madhuri Vinchurkar, Mamta Ashwin, and V. Ramgopal Rao, “A Novel PET-Based Piezoresistive MEMS Sensor Platform for Agricultural Applications,” Journal of Microelectromechanical Systems, Vol. 26, No. 4, PP. 746-748, August 2017.
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